- Final visual inspection equipment for wafers 1000EX¡¢1000EX-II
- <Product Overview>
The Inspectra 1000EX and 1000EX-II enable high-speed defect inspection of wafers that have gone through final processing for flaws, particles, spots, and probe marks.
The equipment features processing capacity hundreds of times that of manual visual chip examination.
Worth special mention is the fact that the relative density of wafers is now greater than it was previously. This equipment has been used extensively for the inspection of in-car chips, which involves a strict appearance defect standard.
- Features
-
- Making simple programs is now easy with Toray's own specially developed quality goods automatic sorting method, which is also optimal for small-lot, multiple-item inspection (e.g. in-car IC, LCD drivers, CCDs, home computers, optical devices, and more).
- The Inspectra 1000EX and 1000EX-II are capable of throughput of 87 (eight-inch) and 160 (eight-inch) wafers per hour respectively. We also have equipment that can handle 300 mm items.
- Wafer surface testing equipment
WM-7S (equipment for 2 to 8-inch wafers)
WM-10 (equipment for 6, 8, and 12-inch wafers)
- <Product Overview>
- Our products test non-patterned wafer surfaces for debris, covering volume, size, and coordinates, with a high degree of sensitivity and high throughput.
- <Features>
-
- Though the use of the Violet-LD, the products achieve a high degree of sensitivity as well as cutting planning costs
- High-performance, reasonably-priced, easy to operate, minimal space requirements
- Through the optional automated sensitivity compensatory function, maintenance operations are reduced dramatically
- Applicable for the full range of membranes including Cu, Low-K
- Micro-scratching and COP partial measurement possible
- Energy-saving features reduce environmental stress
| WM-7S | ||
|---|---|---|
| Light source | Violet-LD | |
| Screening/scanning system | Scattered light detection/Spiral scanning system | |
| Sensitivity | Bare Si 0¡¥079¦Ì£í Film 0¡¥12¦Ì£í |
|
| Reproducibility | ¦Òn/x¡å1¡ó¡ÊMore than 99¡ó¡Ë | |
| Dynamic range | 0.079¦Ì£í ¡Á 5¦Ì£í | |
| Coordinate precision | 3¦Ò¡å100¦Ì£í | |
| Required floor space | 860(W) ¡ß 900(D) | |
| Size¡Êmm¡Ë | 860(W) ¡ß 900(D) ¡ß 1,650(H) | |
| Mass¡ÊKg¡Ë | 600 | |
| WM-10 | ||
|---|---|---|
| Light Source | Violet-LD | |
| Screening/scanning system | Scattered light detection/Spiral scanning system | |
| Sensitivity | Bare Si 0¡¥048¦Ì£í Film 0¡¥060¦Ì£í |
|
| Reproducibility | ¦Òn/x¡å1¡ó¡ÊMore than 99¡ó¡Ë | |
| Dynamic range | 0.048¦Ì£í ¡Á 5¦Ì£í | |
| Coordinate precision | 3¦Ò¡å100¦Ì£í | |
| Required floor space | 860(W) ¡ß 900(D) | |
| Size¡Êmm¡Ë | 860(W) ¡ß 900(D) ¡ß 1,650(H) | |
| Mass¡ÊKg¡Ë | 600 | |
